Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195695 | Ion implantation method, ion implantation apparatus and semiconductor device | Moriz Jelinek, Michael Brugger, Hans-Joachim Schulze, Werner Schustereder | 2021-12-07 |
| 10096507 | Thin substrate electrostatic chuck system and method | Ewald Wiltsche | 2018-10-09 |
| 9601363 | Thin substrate electrostatic chuck system and method | Ewald Wiltsche | 2017-03-21 |
| 9030797 | Thin substrate electrostatic chuck system and method | Ewald Wiltsche | 2015-05-12 |
| 5297858 | Safety coupler-air brake interlock | — | 1994-03-29 |