Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096507 | Thin substrate electrostatic chuck system and method | Peter Zupan | 2018-10-09 |
| 9601363 | Thin substrate electrostatic chuck system and method | Peter Zupan | 2017-03-21 |
| 9030797 | Thin substrate electrostatic chuck system and method | Peter Zupan | 2015-05-12 |