Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8936832 | Device and method for wet treating plate-like-articles | Michael Brugger | 2015-01-20 |
| 8801865 | Device and process for wet treating a peripheral area of a wafer-shaped article | Dieter Frank, Jurgen Parzefall | 2014-08-12 |
| 8231939 | Device and method for wet treating plate-like-articles | Michael Brugger | 2012-07-31 |