JP

Jurgen Parzefall

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,119,682 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8801865 Device and process for wet treating a peripheral area of a wafer-shaped article Dieter Frank, Alexander Schwarzfurtner 2014-08-12