Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12217980 | Apparatus for processing a wafer, and method of controlling such an apparatus | Pradeep Thirugnanam, Matija Ponikvar, Alois Goller | 2025-02-04 | |
| 11053586 | Coated flat component in a CVD reactor | Marcel KOLLBERG | 2021-07-06 | |
| 10658204 | Spin chuck with concentrated center and radial heating | Bridget Hill, Michael PUGGL, Gerhard Mueller, Henry Roger Osner, Karl-Heinz Hohenwarter +1 more | 2020-05-19 | $40,560,000 |
| 10438823 | Substrate treatment device | — | 2019-10-08 | |
| 10312117 | Apparatus and radiant heating plate for processing wafer-shaped articles | Hongbo Si, Bridget Hill, Butch Berney | 2019-06-04 | $68,418,000 |
| 8841221 | MOCVD reactor having cylindrical gas inlet element | Oliver Schön | 2014-09-23 | $789,000 |