Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spin chuck with concentrated center and radial heating

Spin chuck with concentrated center and radial heating

US Patent 10658204 · Granted May 19, 2020

Estimated economic value: $40,560,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus for processing a wafer, and method of controlling such an apparatus2025
Vapor delivery head for preventing stiction of high aspect ratio structures and/2025
Autoconfiguration of hardware components of various modules of a substrate proce2024
Clipping mechanism for fastening a substrate for a surface treatment of the subs2024
Wafer cleaning method and apparatus therefore2023
Coated flat component in a CVD reactor2021
Motorcycle with an electrically driveable front wheel2020
Using identifiers to map edge ring part numbers onto slot numbers2020
Substrate treatment device2019
Stereo camera for vehicles2019
Apparatus and radiant heating plate for processing wafer-shaped articles2019
Apparatus and radiant heating plate for processing wafer-shaped articles2019