Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Autoconfiguration of hardware components of various modules of a substrate processing tool

Autoconfiguration of hardware components of various modules of a substrate processing tool

US Patent 12073224 · Granted Aug 27, 2024

Estimated economic value: $110,858,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Data capture and transformation to support data analysis and machine learning fo2025
Control of semiconductor manufacturing equipment in mixed reality environments2024
Model-based scheduling for substrate processing systems2024
Real-time health monitoring of semiconductor manufacturing equipment2021
System and method for automating user interaction for semiconductor manufacturin2020
Spin chuck with concentrated center and radial heating2020
Using identifiers to map edge ring part numbers onto slot numbers2020
Method and apparatus for utilizing task value units for imaging interpretation a2019
Apparatus and radiant heating plate for processing wafer-shaped articles2019
Gooseneck style vent2019
Flapper valve adaptor for a roof vent and method of installing the same2019
Method and apparatus for liquid treatment of wafer shaped articles2018