Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852636 | Insitu post etch process to remove remaining photoresist and residual sidewall passivation | — | 2005-02-08 |
| 6830622 | Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof | John Daugherty | 2004-12-14 |
| 6790242 | Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof | Christopher C. Chang, John Daugherty | 2004-09-14 |
| 6780787 | Low contamination components for semiconductor processing apparatus and methods for making components | — | 2004-08-24 |
| 6773751 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | John Daugherty, Christopher C. Chang | 2004-08-10 |
| 6620520 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Christopher C. Chang, John Daugherty | 2003-09-16 |
| 6613442 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | John Daugherty, Christopher C. Chang | 2003-09-02 |
| 6537429 | Diamond coatings on reactor wall and method of manufacturing thereof | John Daugherty, Christopher C. Chang | 2003-03-25 |
| 6533910 | Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof | John Daugherty, Christopher C. Chang | 2003-03-18 |
| 6475298 | Post-metal etch treatment to prevent corrosion | Gregory J. Goldspring | 2002-11-05 |
| 6296778 | Method and apparatus for simulating standard test wafers | Gregory J. Goldspring | 2001-10-02 |
| 6242107 | Methods for etching an aluminum-containing layer | — | 2001-06-05 |
| 6069035 | Techniques for etching a transition metal-containing layer | Gregory J. Goldspring | 2000-05-30 |
| 5994235 | Methods for etching an aluminum-containing layer | — | 1999-11-30 |