Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8292698 | On-line chamber cleaning using dry ice blasting | Hong Shih, Oana M. Leonte, John Daugherty, Tuochuan Huang, Michael C. May | 2012-10-23 |
| 7270760 | Method and apparatus for simulating standard test wafers | Robert O'Donnell | 2007-09-18 |
| 6774045 | Residual halogen reduction with microwave stripper | Shenjian Liu | 2004-08-10 |
| 6475298 | Post-metal etch treatment to prevent corrosion | Robert O'Donnell | 2002-11-05 |
| 6306312 | Method for etching a gold metal layer using a titanium hardmask | Gladys So-Wan Lo, David W. Mytton | 2001-10-23 |
| 6296778 | Method and apparatus for simulating standard test wafers | Robert O'Donnell | 2001-10-02 |
| 6069035 | Techniques for etching a transition metal-containing layer | Robert O'Donnell | 2000-05-30 |
| 5883007 | Methods and apparatuses for improving photoresist selectivity and reducing etch rate loading | Susan C. Abraham | 1999-03-16 |