Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8431461 | Silicon nitride dry trim without top pulldown | Qinghua Zhong, Yoshie Kimura, Tae Won Kim, Qian Fu, Ganesh Upadhyaya +1 more | 2013-04-30 |
| 6777173 | H2O vapor as a processing gas for crust, resist, and residue removal for post ion implant resist strip | Anthony Chen | 2004-08-17 |
| 6554952 | Method and apparatus for etching a gold metal layer using a titanium hardmask | David W. Mytton, Greg Goldspring | 2003-04-29 |
| 6306312 | Method for etching a gold metal layer using a titanium hardmask | David W. Mytton, Gregory J. Goldspring | 2001-10-23 |