Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus

Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus

US Patent 8534303 · Granted Sep 17, 2013

Estimated economic value: $6,583,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Backside reactive inhibition gas2025
Removable showerhead faceplate for semiconductor processing tools2025
Metal deposition2025
Method and apparatus for processing wafer-shaped articles2020
Using identifiers to map edge ring part numbers onto slot numbers2020
Mask shrink layer for high aspect ratio dielectric etch2019
Wafer support pedestal with wafer anti-slip and anti-rotation features2019
Technique to deposit metal-containing sidewall passivation for high aspect ratio2019
Vapor delivery method and apparatus for solid and liquid precursors2018
Systems and methods for measuring entrained vapor2018
Method and apparatus for physical confinement of a liquid meniscus over a semico2017
Method for etching features in dielectric layers2017