{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof", "item": "https://www.patentleaderboard.com/patent/7128804"}]}
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Home › Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof

Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof

US Patent 7128804 · Granted Oct 31, 2006

Estimated economic value: $8,256,000 ⓘ

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