Chamber component cleanliness measurement system

Assignee

• Lam Research

Inventors

• Amir A. Yasseri (15 patents)
• Duane Outka (34 patents)
• Armen Avoyan (32 patents)
• Kennet Baylon (3 patents)
• John Daugherty (74 patents)
• Girish M. HUNDI (5 patents)
• Cliff La Croix (12 patents)

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