Method for conditioning semiconductor processing chamber components

Assignee

• Lam Research

Inventors

• Lin Xu (62 patents)
• David Joseph WETZEL (6 patents)
• John Daugherty (74 patents)
• Hong Shih (82 patents)
• Satish SRINIVASAN (10 patents)
• Yuanping Song (4 patents)
• Johnny PHAM (1 patents)
• Yiwei Song (7 patents)
• Christopher Kimball (27 patents)

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