Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7383601 | Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same | Michael Ravkin | 2008-06-10 |
| 7383844 | Meniscus, vacuum, IPA vapor, drying manifold | Carl Woods, James P. Garcia | 2008-06-10 |
| 7367345 | Apparatus and method for providing a confined liquid for immersion lithography | David Hemker, Fred C. Redeker, John M. Boyd, Michael Ravkin, Mikhail Korolik | 2008-05-06 |
| 7350316 | Meniscus proximity system for cleaning semiconductor substrate surfaces | Carl Woods, James P. Garcia | 2008-04-01 |
| 7264007 | Method and apparatus for cleaning a substrate using megasonic power | John M. Boyd, Mike Ravkin, Fred C. Redeker | 2007-09-04 |
| 7252097 | System and method for integrating in-situ metrology within a wafer process | John M. Boyd, Michael Ravkin, Fred C. Redeker | 2007-08-07 |
| 7240679 | System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold | Carl Woods | 2007-07-10 |
| 7234477 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | Mike Ravkin, Carl Woods, Fritz Redeker, James P. Garcia, Afshin Nickhou | 2007-06-26 |
| 7198055 | Meniscus, vacuum, IPA vapor, drying manifold | Carl Woods, James P. Garcia | 2007-04-03 |
| 7192488 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus | Carl Woods, James P. Garcia | 2007-03-20 |
| 7170190 | Apparatus for oscillating a head and methods for implementing the same | Randolph Treur, John M. Boyd, Tom Anderson | 2007-01-30 |
| 7153400 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | Mike Ravkin, John M. Boyd, Yezdi Dordi, Fred C. Redeker | 2006-12-26 |
| 7143527 | System and method for modulating flow through multiple ports in a proximity head | James P. Garcia, Fred C. Redeker | 2006-12-05 |
| 7127831 | Methods and systems for processing a substrate using a dynamic liquid meniscus | James P. Garcia, Michael Ravkin, Fred C. Redeker, Carl Woods | 2006-10-31 |
| 7069937 | Vertical proximity processor | James P. Garcia, Mike Ravkin, Carl Woods, Fred C. Redeker | 2006-07-04 |
| 7045018 | Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same | Michael Ravkin | 2006-05-16 |
| 7003899 | System and method for modulating flow through multiple ports in a proximity head | James P. Garcia, Fred C. Redeker | 2006-02-28 |
| 7000622 | Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus | Carl Woods, James P. Garcia | 2006-02-21 |
| 6988327 | Methods and systems for processing a substrate using a dynamic liquid meniscus | James P. Garcia, Michael Ravkin, Fred C. Redeker, Carl Woods | 2006-01-24 |
| 6827793 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, Mike Ravkin | 2004-12-07 |
| 6622335 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, Mike Ravkin | 2003-09-23 |
| 6616516 | Method and apparatus for asymmetric processing of front side and back side of semiconductor substrates | Michael Ravkin, Katrina Mikhaylich | 2003-09-09 |
| 6616772 | Methods for wafer proximity cleaning and drying | Mike Ravkin, Glen Travis, Jim Keller, Wilbur C. Krusell | 2003-09-09 |
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Katrina Mikhaylichenko, Mike Ravkin | 2003-08-26 |
| 6594847 | Single wafer residue, thin film removal and clean | Wilbur C. Krusell, Mike Ravkin | 2003-07-22 |