Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616772 | Methods for wafer proximity cleaning and drying | John M. de Larios, Mike Ravkin, Jim Keller, Wilbur C. Krusell | 2003-09-09 |
| 6488040 | Capillary proximity heads for single wafer cleaning and drying | John M. de Larios, Mike Ravkin, Jim Keller, Wilbur C. Krusell | 2002-12-03 |