Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6593282 | Cleaning solutions for semiconductor substrates after polishing of copper film | Xu Li, Yuexing Zhao, Diane Hymes | 2003-07-15 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Katrina Mikhaylichenko, Vladislav V. Yakovlev, Mike Ravkin | 2003-02-18 |
| 6488040 | Capillary proximity heads for single wafer cleaning and drying | Mike Ravkin, Glen Travis, Jim Keller, Wilbur C. Krusell | 2002-12-03 |
| 6303551 | Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper film | Xu Li, Yuexing Zhao, Diane Hymes | 2001-10-16 |
| 6294027 | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film | Xu Li, Yuexing Zhao, Diane Hymes | 2001-09-25 |
| 6261407 | Method and apparatus for removal of thin films from wafers | Helmuth Treichel, Michael Ravkin, Don E. Anderson | 2001-07-17 |
| 5806126 | Apparatus for a brush assembly | Mikhail Ravkin, Douglas G. Gardner | 1998-09-15 |
| 5294568 | Method of selective etching native oxide | Michael A. McNeilly, Bruce E. Deal, Dah-Bin Kao | 1994-03-15 |