Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7416370 | Method and apparatus for transporting a substrate using non-Newtonian fluid | John M. de Larios, John Parks, Mikhail Korolik, Fred C. Redeker | 2008-08-26 |
| 7387689 | Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | John M. de Larios, Carl Woods, Fritz Redeker, James P. Garcia | 2008-06-17 |
| 7350315 | Edge wheel dry manifold | Glenn W. Davis, Carl Woods, John Parks, Fred C. Redeker, Michael L. Orbock | 2008-04-01 |
| 7264007 | Method and apparatus for cleaning a substrate using megasonic power | John M. Boyd, Fred C. Redeker, John M. de Larios | 2007-09-04 |
| 7234477 | Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces | John M. de Larios, Carl Woods, Fritz Redeker, James P. Garcia, Afshin Nickhou | 2007-06-26 |
| 7153400 | Apparatus and method for depositing and planarizing thin films of semiconductor wafers | John M. Boyd, Yezdi Dordi, Fred C. Redeker, John M. de Larios | 2006-12-26 |
| 7069937 | Vertical proximity processor | James P. Garcia, Carl Woods, Fred C. Redeker, John M. de Larios | 2006-07-04 |
| 7029369 | End-point detection apparatus | Katrina Mikhaylich, Yehiel Gotkis | 2006-04-18 |
| 6858091 | Method for controlling galvanic corrosion effects on a single-wafer cleaning system | John M. Boyd, Katrina Mikhaylich | 2005-02-22 |
| 6827793 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, John M. de Larios | 2004-12-07 |
| 6726530 | End-point detection system for chemical mechanical polishing applications | Katrina Mikhaylich, Yehiel Gotkis | 2004-04-27 |
| 6711775 | System for cleaning a semiconductor wafer | Katrina Mikhaylich, Don E. Anderson | 2004-03-30 |
| 6679763 | Apparatus and method for qualifying a chemical mechanical planarization process | John M. Boyd, Katrina Mikhaylich | 2004-01-20 |
| 6622335 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, John M. de Larios | 2003-09-23 |
| 6616772 | Methods for wafer proximity cleaning and drying | John M. de Larios, Glen Travis, Jim Keller, Wilbur C. Krusell | 2003-09-09 |
| 6611326 | System and apparatus for evaluating the effectiveness of wafer drying operations | Vladislav V. Yakovlev, Katrina Mikhaylichenko, John M. de Larios | 2003-08-26 |
| 6594847 | Single wafer residue, thin film removal and clean | Wilbur C. Krusell, John M. de Larios | 2003-07-22 |
| 6543084 | Wafer scrubbing brush core | Tanlin Dickey, Julia Svirchevski, Donald Anderson, Helmuth Treichel, Roy Winston Pascal +1 more | 2003-04-08 |
| 6537381 | Method for cleaning and treating a semiconductor wafer after chemical mechanical polishing | Katrina Mikhaylich | 2003-03-25 |
| 6521050 | Methods for evaluating advanced wafer drying techniques | Katrina Mikhaylichenko, Vladislav V. Yakovlev, John M. de Larios | 2003-02-18 |
| 6488040 | Capillary proximity heads for single wafer cleaning and drying | John M. de Larios, Glen Travis, Jim Keller, Wilbur C. Krusell | 2002-12-03 |
| 6435952 | Apparatus and method for qualifying a chemical mechanical planarization process | John M. Boyd, Katrina Mikhaylich | 2002-08-20 |
| 6375540 | End-point detection system for chemical mechanical posing applications | Katrina Mikhaylich, Yehiel Gotkis | 2002-04-23 |
| 6361414 | Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process | Katrina Mikhaylich, Don E. Anderson | 2002-03-26 |
| 6240588 | Wafer scrubbing brush core | Tanlin Dickey, Julia Svirchevski, Donald Anderson, Helmuth Treichel, Roy Winston Pascal +1 more | 2001-06-05 |