Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653224 | Methods for fabricating interconnect structures having Low K dielectric properties | Rodney Kistler, Leonid Romm, Te Hua Lin | 2003-11-25 |
| 6585572 | Subaperture chemical mechanical polishing system | Miguel Saldana, John M. Boyd, Aleksander Owczarz | 2003-07-01 |
| 6579157 | Polishing pad ironing system and method for implementing the same | Aleksander Owczarz, Rodney Kistler | 2003-06-17 |
| 6540587 | Infrared end-point detection system | Rodney Kistler | 2003-04-01 |
| 6527870 | Wafer cleaning module and method for cleaning the surface of a substrate | — | 2003-03-04 |
| 6503129 | Activated slurry CMP system and methods for implementing the same | — | 2003-01-07 |
| 6468134 | Method and apparatus for slurry distribution | — | 2002-10-22 |
| 6454637 | Edge instability suppressing device and system | — | 2002-09-24 |
| 6386962 | Wafer carrier with groove for decoupling retainer ring from water | Aleksander Owczarz | 2002-05-14 |
| 6375540 | End-point detection system for chemical mechanical posing applications | Katrina Mikhaylich, Mike Ravkin | 2002-04-23 |
| 6340326 | System and method for controlled polishing and planarization of semiconductor wafers | Rod Kistler | 2002-01-22 |
| 6328042 | Wafer cleaning module and method for cleaning the surface of a substrate | — | 2001-12-11 |
| 6261158 | Multi-step chemical mechanical polishing | Karey Holland, Ajoy Zutshi, Fen Dai, C. Jerry Yang, Dennis Schey +2 more | 2001-07-17 |