Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9200180 | Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use | Gautam Banerjee, Timothy Frederick Compton, Junaid Ahmed Siddiqui | 2015-12-01 |
| 7848839 | System, method, and medium for an endpoint detection scheme for copper low-dielectric damascene structures for improved dielectric and copper loss | Rahul Surana, Girish Dixit | 2010-12-07 |
| 7678702 | CMP composition of boron surface-modified abrasive and nitro-substituted sulfonic acid and method of use | Timothy Frederick Compton, Junaid Ahmed Siddiqui | 2010-03-16 |
| 7514363 | Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use | Gautam Banerjee, Timothy Frederick Compton, Junaid Ahmed Siddiqui | 2009-04-07 |
| 7354332 | Technique for process-qualifying a semiconductor manufacturing tool using metrology data | Rahul Surana | 2008-04-08 |
| 6620027 | Method and apparatus for hard pad polishing | Rajeev Bajaj, Fred C. Redeker, Yutao Ma, Kapila Wijekoon | 2003-09-16 |
| 6261158 | Multi-step chemical mechanical polishing | Karey Holland, Fen Dai, Yehiel Gotkis, C. Jerry Yang, Dennis Schey +2 more | 2001-07-17 |
| 5604164 | Refractory boat and method of manufacture | Lionel C. Montgomery | 1997-02-18 |