Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9375823 | Grooved CMP pads | Robert Kerprich, Diane Scott, Sudhanshu Misra | 2016-06-28 |
| 9180570 | Grooved CMP pad | Robert Kerprich, Diane Scott, Sudhanshu Misra | 2015-11-10 |
| 6261158 | Multi-step chemical mechanical polishing | Ajoy Zutshi, Fen Dai, Yehiel Gotkis, C. Jerry Yang, Dennis Schey +2 more | 2001-07-17 |
| 6234883 | Method and apparatus for concurrent pad conditioning and wafer buff in chemical mechanical polishing | Michael Berman | 2001-05-22 |
| 4919750 | Etching metal films with complexing chloride plasma | Robert C. Bausmith, William J. Cote, John Cronin, Carter W. Kaanta, Pei-Ing Lee +1 more | 1990-04-24 |
| 4786360 | Anisotropic etch process for tungsten metallurgy | William J. Cote, Terrance M. Wright | 1988-11-22 |
| 4624740 | Tailoring of via-hole sidewall slope | Allan D. Abrams, Robert C. Bausmith, Steven P. Holland | 1986-11-25 |