Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10563973 | All surface film metrology system | Shifang Li, Lena Nicolaides, Richard Graetz | 2020-02-18 |
| 10317344 | Speed enhancement of chromatic confocal metrology | — | 2019-06-11 |
| 9885671 | Miniaturized imaging apparatus for wafer edge | — | 2018-02-06 |
| 9885656 | Line scan knife edge height sensor for semiconductor inspection and metrology | Shifang Li | 2018-02-06 |
| 9752992 | Variable image field curvature for object inspection | — | 2017-09-05 |
| 9719943 | Wafer edge inspection with trajectory following edge profile | — | 2017-08-01 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |
| 9640449 | Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy | Timothy Goodwin, Lena Nicolaides, Mohan Mahadevan, Shifang Li | 2017-05-02 |
| 4805461 | Transducer and systems for high speed measurement of shock loads | Y. M. Gupta | 1989-02-21 |