Issued Patents All Time
Showing 51–75 of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6922244 | Thin film optical measurement system and method with calibrating ellipsometer | Allan Rosencwaig | 2005-07-26 |
| 6894781 | Monitoring temperature and sample characteristics using a rotating compensator ellipsometer | Lanhua Wei, Allan Rosencwaig | 2005-05-17 |
| 6882421 | Apparatus for optical measurements of nitrogen concentration in thin films | Youxian Wen | 2005-04-19 |
| 6882424 | Systems and methods for evaluating semiconductor layers | Li-Yi Chen | 2005-04-19 |
| 6867866 | CD metrology analysis using green's function | Yia-Chung Chang, Hanyou Chu | 2005-03-15 |
| 6859281 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2005-02-22 |
| 6856385 | Spatial averaging technique for ellipsometry and reflectometry | Lanhua Wei, Hanyou Chu | 2005-02-15 |
| 6842259 | Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2005-01-11 |
| 6836338 | Apparatus for evaluating metalized layers on semiconductors | Li-Yi Chen | 2004-12-28 |
| 6836328 | Detector configurations for optical metrology | — | 2004-12-28 |
| 6831743 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 2004-12-14 |
| 6829057 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2004-12-07 |
| 6813034 | Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2004-11-02 |
| 6784993 | Apparatus for optical measurements of nitrogen concentration in thin films | Youxian Wen | 2004-08-31 |
| 6778911 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2004-08-17 |
| 6774997 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Allan Rosencwaig | 2004-08-10 |
| 6768785 | Calibration and alignment of X-ray reflectometric systems | Louis N. Koppel, Craig E. Uhrich | 2004-07-27 |
| 6753962 | Thin film optical measurement system and method with calibrating ellipsometer | Jeffrey T. Fanton, Craig E. Uhrich | 2004-06-22 |
| 6754305 | Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometry | Allan Rosencwaig | 2004-06-22 |
| 6704661 | Real time analysis of periodic structures on semiconductors | Hanyou Chu | 2004-03-09 |
| 6678349 | Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurements | Allan Rosencwaig | 2004-01-13 |
| 6678046 | Detector configurations for optical metrology | — | 2004-01-13 |
| 6671047 | Combination thermal wave and optical spectroscopy measurement systems | Minna Hovinen | 2003-12-30 |
| 6665071 | Method for determining ion concentration and energy of shallow junction implants | Minna Hovinen | 2003-12-16 |
| 6654131 | Critical dimension analysis with simultaneous multiple angle of incidence measurements | Allan Rosencwaig | 2003-11-25 |