Issued Patents All Time
Showing 101–125 of 126 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6278519 | Apparatus for analyzing multi-layer thin film stacks on semiconductors | Allan Rosencwaig | 2001-08-21 |
| 6191846 | Apparatus for evaluating metalized layers on semiconductors | Li-Yi Chen | 2001-02-20 |
| 6134012 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 2000-10-17 |
| 5978074 | Apparatus for evaluating metalized layers on semiconductors | Li-Yi Chen | 1999-11-02 |
| 5973787 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 1999-10-26 |
| 5953446 | Method and apparatus for optical data analysis | John J. Sidorowich | 1999-09-14 |
| 5900939 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jeffrey T. Fanton | 1999-05-04 |
| 5877859 | Broadband spectroscopic rotating compensator ellipsometer | David E. Aspnes | 1999-03-02 |
| 5864633 | Method and apparatus for optical data analysis | John J. Sidorowich | 1999-01-26 |
| 5798837 | Thin film optical measurement system and method with calibrating ellipsometer | David E. Aspnes, Jeffrey T. Fanton | 1998-08-25 |
| 5596411 | Integrated spectroscopic ellipsometer | Jeffrey T. Fanton | 1997-01-21 |
| 5181080 | Method and apparatus for evaluating the thickness of thin films | Jeffrey T. Fanton, Allan Rosencwaig | 1993-01-19 |
| 5159412 | Optical measurement device with enhanced sensitivity | David L. Willenborg, Allan Rosencwaig | 1992-10-27 |
| 5149978 | Apparatus for measuring grain sizes in metalized layers | Allan Rosencwaig | 1992-09-22 |
| 5074669 | Method and apparatus for evaluating ion implant dosage levels in semiconductors | — | 1991-12-24 |
| 5042951 | High resolution ellipsometric apparatus | Nathan Gold, David L. Willenborg, Allan Rosencwaig | 1991-08-27 |
| 5042952 | Method and apparatus for evaluating surface and subsurface and subsurface features in a semiconductor | Allan Rosencwaig, Walter Lee Smith | 1991-08-27 |
| 4999014 | Method and apparatus for measuring thickness of thin films | Nathan Gold, David L. Willenborg, Allan Rosencwaig | 1991-03-12 |
| 4952063 | Method and apparatus for evaluating surface and subsurface features in a semiconductor | Allan Rosencwaig, Walter Lee Smith | 1990-08-28 |
| 4854710 | Method and apparatus for evaluating surface and subsurface features in a semiconductor | Allan Rosencwaig, Walter Lee Smith | 1989-08-08 |
| 4750822 | Method and apparatus for optically detecting surface states in materials | Allan Rosencwaig, Walter Lee Smith | 1988-06-14 |
| 4679946 | Evaluating both thickness and compositional variables in a thin film sample | Allan Rosencwaig | 1987-07-14 |
| 4634290 | Method and apparatus for detecting thermal waves | Allan Rosencwaig | 1987-01-06 |
| 4632561 | Evaluation of surface and subsurface characteristics of a sample | Allan Rosencwaig | 1986-12-30 |
| 4579463 | Detecting thermal waves to evaluate thermal parameters | Allan Rosencwaig, Walter Lee Smith, David L. Willenborg | 1986-04-01 |