Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12281893 | Characterizing and measuring in small boxes using XPS with multiple measurements | Heath A. Pois, Wei Ti Lee, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more | 2025-04-22 |
| 11988502 | Characterizing and measuring in small boxes using XPS with multiple measurements | Heath A. Pois, Wei Ti Lee, Dmitry Kislitsyn, Parker Lund, Benny Tseng +2 more | 2024-05-21 |
| 11852467 | Method and system for monitoring deposition process | Heath A. Pois, Srinivasan Rangarajan | 2023-12-26 |