Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6715496 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Padmanabhan Krishnaraj, Zhengquan Tan | 2004-04-06 |
| 6596123 | Method and apparatus for cleaning a semiconductor wafer processing system | Michael Kwan, Alan W. Collins, Padmanabhan Krishnaraj, Zhengquan Tan | 2003-07-22 |