Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939808 | Undoped and fluorinated amorphous carbon film as pattern mask for metal etch | Jie Yuan, Yan Ye | 2005-09-06 |
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Kasra Khazeni, Zhengquan Tan | 2002-07-23 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Vijay D. Parkhe | 2002-05-28 |
| 6211065 | Method of depositing and amorphous fluorocarbon film using HDP-CVD | Ming Xi, LIE CHENG, Turgut Sahin, Yaxin Wang | 2001-04-03 |
| 5861086 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Vijay D. Parkhe | 1999-01-19 |