| 12002665 |
Real-time detection of particulate matter during deposition chamber manufacturing |
Mehdi Vaez-Iravani, Todd Egan |
2024-06-04 |
| 11908716 |
Image-based in-situ process monitoring |
Guoheng Zhao, Venkatakaushik Voleti, Todd Egan, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more |
2024-02-20 |
| 11728141 |
Gas hub for plasma reactor |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2023-08-15 |
| 11244811 |
Plasma reactor with highly symmetrical four-fold gas injection |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2022-02-08 |
| 11139150 |
Nozzle for multi-zone gas injection assembly |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2021-10-05 |
| 11119051 |
Particle detection for substrate processing |
Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more |
2021-09-14 |
| 10923371 |
Metrology system for substrate deformation measurement |
Mehdi Vaez-Iravani, Todd Egan, Samer Banna |
2021-02-16 |
| 10845317 |
Particle detection for substrate processing |
Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more |
2020-11-24 |
| 10553398 |
Power deposition control in inductively coupled plasma (ICP) reactors |
Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Dan Marohl, Valentin N. Todorow +1 more |
2020-02-04 |
| 10510624 |
Metrology systems with multiple derivative modules for substrate stress and deformation measurement |
Mehdi Vaez-Iravani, Todd Egan, Samer Banna |
2019-12-17 |
| 10410841 |
Side gas injection kit for multi-zone gas injection assembly |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2019-09-10 |
| 10332772 |
Multi-zone heated ESC with independent edge zones |
Vladimir Knyazik, Samer Banna |
2019-06-25 |
| 10271416 |
High efficiency triple-coil inductively coupled plasma source with phase control |
Samer Banna, Waheb Bishara, Ryan Giar, Valentin N. Todorow, Dmitry Lubomirsky |
2019-04-23 |
| 10163606 |
Plasma reactor with highly symmetrical four-fold gas injection |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2018-12-25 |
| 10008368 |
Multi-zone gas injection assembly with azimuthal and radial distribution control |
Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna |
2018-06-26 |
| 9659803 |
Electrostatic chuck with concentric cooling base |
Dmitry Lubomirsky, Samer Banna |
2017-05-23 |
| 9536710 |
Tunable gas delivery assembly with internal diffuser and angular injection |
Vladimir Knyazik, Samer Banna, Waheb Bishara |
2017-01-03 |
| 9472378 |
Multiple zone coil antenna with plural radial lobes |
Vladimir Knyazik, Samer Banna |
2016-10-18 |
| 9312104 |
Coil antenna with plural radial lobes |
Vladimir Knyazik, Samer Banna |
2016-04-12 |
| 9287147 |
Substrate support with advanced edge control provisions |
Samer Banna |
2016-03-15 |
| 8900399 |
Integrated method and system for manufacturing monolithic panels of crystalline solar cells |
Tirunelveli S. Ravi, Ananda H. Kumar, Ashish Asthana, Visweswaren Sivaramakrishnan |
2014-12-02 |
