Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10271416 | High efficiency triple-coil inductively coupled plasma source with phase control | Samer Banna, Waheb Bishara, Valentin N. Todorow, Dmitry Lubomirsky, Kyle Tantiwong | 2019-04-23 |