IB

Ilya Bezel

KL Kla-Tencor: 51 patents #7 of 1,394Top 1%
KL Kla: 17 patents #8 of 758Top 2%
📍 Mountain View, CA: #126 of 11,022 inventorsTop 2%
🗺 California: #4,640 of 386,348 inventorsTop 2%
Overall (All Time): #30,475 of 4,157,543Top 1%
68
Patents All Time

Issued Patents All Time

Showing 26–50 of 68 patents

Patent #TitleCo-InventorsDate
10522340 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Matthew Panzer 2019-12-31
10495287 Nanocrystal-based light source for sample characterization Lauren Wilson, Joshua Wittenberg, Matthew Derstine 2019-12-03
10381216 Continuous-wave laser-sustained plasma illumination source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer 2019-08-13
10283342 Laser sustained plasma light source with graded absorption features Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more 2019-05-07
10257918 System and method for laser-sustained plasma illumination Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav +2 more 2019-04-09
10244613 System and method for electrodeless plasma ignition in laser-sustained plasma light source Anant Chimmalgi, Rudolf Brunner, Anatoly Shchemelinin, Erik Kim, Rajeev Patil 2019-03-26
10217625 Continuous-wave laser-sustained plasma illumination source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer 2019-02-26
10203247 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more 2019-02-12
10139283 Non-contact thermal measurements of VUV optics Anatoly Shchemelinin, Kenneth P. Gross 2018-11-27
10032620 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Anant Chimmalgi, Matthew Panzer 2018-07-24
9941655 High power broadband light source Anant Chimmalgi, Rahul Yadav, Anatoly Shchemelinin, Matthew Derstine 2018-04-10
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2018-03-27
9899205 System and method for inhibiting VUV radiative emission of a laser-sustained plasma source Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg, Aizaz Bhuiyan +3 more 2018-02-20
9887076 Method and system for controlling convective flow in a light-sustained plasma Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2018-02-06
9775226 Method and system for generating a light-sustained plasma in a flanged transmission element Anatoly Shchemelinin, Matthew Derstine 2017-09-26
9735534 Sub 200nm laser pumped homonuclear excimer lasers Richard W. Solarz, Anatoly Shchemelinin 2017-08-15
9721761 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Anant Chimmalgi, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado 2017-08-01
9723703 System and method for transverse pumping of laser-sustained plasma Anatoly Shchemelinin, Richard W. Solarz, Sebaek Oh, Matthew Derstine 2017-08-01
9709811 System and method for separation of pump light and collected light in a laser pumped light source Anatoly Shchemelinin, Matthew Panzer, Eugene Shifrin 2017-07-18
9655225 Method and system for controlling convection within a plasma cell Anatoly Shchemelinin, Matthew Derstine 2017-05-16
9615439 System and method for inhibiting radiative emission of a laser-sustained plasma source Anatoly Shchemelinin, Kenneth P. Gross, Richard W. Solarz, Lauren Wilson, Rahul Yadav +4 more 2017-04-04
9558858 System and method for imaging a sample with a laser sustained plasma illumination output David W. Shortt, Steven R. Lange, Matthew Derstine, Kenneth P. Gross, Wei Zhao +1 more 2017-01-31
9534848 Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Rudolf Brunner +7 more 2017-01-03
9530636 Light source with nanostructured antireflection layer Sebaek Oh, Anant Chimmalgi, Rahul Yadav, Matthew Derstine 2016-12-27
9526158 Laser-sustained plasma light source Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado 2016-12-20