IB

Ilya Bezel

KL Kla-Tencor: 51 patents #7 of 1,394Top 1%
KL Kla: 17 patents #8 of 758Top 2%
📍 Mountain View, CA: #126 of 11,022 inventorsTop 2%
🗺 California: #4,640 of 386,348 inventorsTop 2%
Overall (All Time): #30,475 of 4,157,543Top 1%
68
Patents All Time

Issued Patents All Time

Showing 51–68 of 68 patents

Patent #TitleCo-InventorsDate
9512985 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more 2016-12-06
9516733 Laser-sustained plasma light source Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado 2016-12-06
9433070 Plasma cell with floating flange Anatoly Shchemelinin, Amir Torkaman 2016-08-30
9390892 Laser sustained plasma light source with electrically induced gas flow Anatoly Shchemelinin 2016-07-12
9390902 Method and system for controlling convective flow in a light-sustained plasma Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2016-07-12
9318311 Plasma cell for laser-sustained plasma light source Anant Chimmalgi, Anatoly Shchemelinin, Rajeev Patil 2016-04-19
9263238 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Anant Chimmalgi, Anatoly Shchemelinin, Matthew Derstine, Gildardo Delgado 2016-02-16
9232622 Gas refraction compensation for laser-sustained plasma bulbs Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi 2016-01-05
9185788 Method and system for controlling convection within a plasma cell Anatoly Shchemelinin, Matthew Derstine 2015-11-10
9097577 Adaptive optics for compensating aberrations in light-sustained plasma cells Anatoly Shchemelinin, Yanming Zhao, Matthew Derstine 2015-08-04
9099292 Laser-sustained plasma light source Anatoly Shchemelinin, Yanming Zhao, Gildardo Delgado 2015-08-04
8853655 Gas refraction compensation for laser-sustained plasma bulbs Anatoly Shchemelinin, Alex Salnik, Anant Chimmalgi 2014-10-07
8796652 Laser sustained plasma bulb including water Anatoly Shchemelinin, Matthew Panzer 2014-08-05
8698399 Multi-wavelength pumping to sustain hot plasma Anatoly Shchemelinin, Eugene Shifrin, Matthew Derstine, Richard W. Solarz 2014-04-15
8658967 Optically pumping to sustain plasma Anatoly Shchemelinin, Matthew Derstine 2014-02-25
8517585 Full numerical aperture pump of laser-sustained plasma Anatoly Shchemelinin 2013-08-27
8259771 Initiating laser-sustained plasma Anatoly Shchemelinin, Matthew Derstine 2012-09-04
7804866 Pulse stretcher Anatoly Shchemelinin 2010-09-28