Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978620 | Swirler for laser-sustained plasma light source with reverse vortex flow | Ilya Bezel, Leonid Borisovich Zvedenuk, Amir Torkaman | 2024-05-07 |
| 11921297 | System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution | Ilya Bezel, Matthew Derstine, Nikolay Sherbak | 2024-03-05 |
| 11776804 | Laser-sustained plasma light source with reverse vortex flow | Ilya Bezel, Leonid Borisovich Zvedenuk, Vitaly K. Rerikh, Boris Vasilyevich Potapkin | 2023-10-03 |
| 11690162 | Laser-sustained plasma light source with gas vortex flow | Ilya Bezel, Leonid Borisovich Zvedenuk, Yuriy Gennadievich Kutsenko, Boris Vasilyevich Potapkin, Sumeet Kumar | 2023-06-27 |
| 11635700 | Method and apparatus for EUV mask inspection | Erel Milshtein, Alexander N. Bykanov, Konstantin Tsigutkin, Lauren Wilson, Lubomyr Kucher +4 more | 2023-04-25 |
| 11596048 | Rotating lamp for laser-sustained plasma illumination source | Ilya Bezel, Leonid Borisovich Zvedenuk, Maksim Alexandrovich Deminskii, Boris Vasilyevich Potapkin | 2023-02-28 |
| 11340880 | Application management service including package file | Myung-han Yoo, Shivaun Albright, Shane Konsella, Jorge Miguel Del Hierro, Ajay Sharma | 2022-05-24 |
| 11262591 | System and method for pumping laser sustained plasma with an illumination source having modified pupil power distribution | Ilya Bezel, Matthew Derstine, Nikolay Sherbak | 2022-03-01 |