Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8666703 | Method for automated determination of an optimally parameterized scatterometry model | Jason Ferns, John J. Hench, Serguei Komarov | 2014-03-04 |
| 8090558 | Optical parametric model optimization | — | 2012-01-03 |
| 7933016 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2011-04-26 |
| 7663753 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanevsky, Michael Friedmann, Ian Smith +10 more | 2010-02-16 |
| 7656512 | Method for determining lithographic focus and exposure | Walter D. Mieher, Ady Levy, Chris Mack | 2010-02-02 |
| 7382447 | Method for determining lithographic focus and exposure | Walter D. Mieher, Ady Levy, Chris Mack | 2008-06-03 |
| 7317531 | Apparatus and methods for detecting overlay errors using scatterometry | Walter D. Mieher, Ady Levy, Boris Golovanesky, Michael Friedmann, Ian Smith +10 more | 2008-01-08 |