Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2016-04-12 |
| 9116103 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer +3 more | 2015-08-25 |