Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9146156 | Light source tracking in optical metrology system | Guorong V. Zhuang, Shankar Krishnan, Johannes D. de Veer, Klaus Flock, Lawrence D. Rotter | 2015-09-29 |
| 9116103 | Multiple angles of incidence semiconductor metrology systems and methods | Klaus Flock, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more | 2015-08-25 |
| 8896832 | Discrete polarization scatterometry | Andrew V. Hill, Amnon Manassen, Daniel Kandel, Vladimir Levinski, Joel Seligson +3 more | 2014-11-25 |
| 8860937 | Metrology systems and methods for high aspect ratio and large lateral dimension structures | Thaddeus Gerard Dziura, Xuefeng Liu, Jonathan M. Madsen, Alexander Kuznetsov, Johannes D. de Veer +3 more | 2014-10-14 |
| 8643841 | Angle-resolved spectroscopic instrument | Lawrence D. Rotter | 2014-02-04 |
| 8227586 | Human polyomavirus, designated the wu virus, obtained from human respiratory secretions | Guang Wu, Anne Gaynor, Michael Nissen, Theo Pieter Sloots | 2012-07-24 |
| 8111399 | System and method for performing photothermal measurements and relaxation compensation | Lawrence D. Rotter, Derrick Shaughnessy, Mark Frederick Senko | 2012-02-07 |
| D631408 | Motorcycle linkage | Rastislav Brodsky | 2011-01-25 |
| 7304735 | Broadband wavelength selective filter | James Hendrix, Adam E. Norton | 2007-12-04 |
| 7251036 | Beam splitter/combiner for optical metrology tool | James Hendrix, Michael Ellison, Joel Ng | 2007-07-31 |
| 7227637 | Measurement system with separate optimized beam paths | Lawrence D. Rotter, Jeffrey T. Fanton, Jeffrey E. McAninch | 2007-06-05 |
| 7206125 | Infrared blocking filter for broadband Optical metrology | — | 2007-04-17 |
| 7190460 | Focusing optics for small spot optical metrology | — | 2007-03-13 |
| 7154607 | Flat spectrum illumination source for optical metrology | James Hendrix, David M. Aikens, Lawrence D. Rotter, Joel Ng | 2006-12-26 |
| 7061614 | Measurement system with separate optimized beam paths | Lawrence D. Rotter, Jeffrey T. Fanton, Jeffrey E. McAninch | 2006-06-13 |
| 7050162 | Optical metrology tool having improved contrast | Jon Opsal | 2006-05-23 |
| 7027158 | Beam splitter/combiner for optical meterology tool | James Hendrix, Michael Ellison, Joel Ng | 2006-04-11 |
| 7020227 | Method and apparatus for high-speed clock data recovery using low-speed circuits | Jyn-Bang Shyu, Yu-Chi Cheng | 2006-03-28 |
| 6879449 | Broadband refractive objective for small spot optical metrology | David M. Aikens | 2005-04-12 |
| 6784991 | Diffractive optical elements and grid polarizers in focusing spectroscopic ellipsometers | Lawrence D. Rotter | 2004-08-31 |
| 6765444 | Cross clocked lock detector circuit for phase locked loop | Jyn-Bang Shyu | 2004-07-20 |
| 6744505 | Compact imaging spectrometer | David M. Aikens | 2004-06-01 |
| 6597212 | Divide-by-N differential phase interpolator | Yu-Chi Cheng | 2003-07-22 |
| 6587282 | Broadband refractive objective for small spot optical metrology | David M. Aikens | 2003-07-01 |
| 6531905 | Flip-flop with metastability reduction | — | 2003-03-11 |