Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126083 | Superstrate and a method of using the same | Niyaz Khusnatdinov, Christopher Ellis Jones | 2021-09-21 |
| 10663869 | Imprint system and imprinting process with spatially non-uniform illumination | Niyaz Khusnatdinov, Edward Brian Fletcher, Craig William Cone, Zhengmao Ye | 2020-05-26 |
| 10580659 | Planarization process and apparatus | Niyaz Khusnatdinov, Dwayne L. LaBrake | 2020-03-03 |
| RE47483 | Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template | Mario Johannes Meissl, Byung-Jin Choi, Sidlgata V. Sreenivasan | 2019-07-02 |
| 10079152 | Method for forming planarized etch mask structures over existing topography | Dwayne L. LaBrake | 2018-09-18 |
| 9452574 | Fabrication of seamless large area master templates for imprint lithography using step and repeat tools | Michael Nevin Miller, Frank Y. Xu | 2016-09-27 |
| 8980751 | Methods and systems of material removal and pattern transfer | Gerard Schmid, Michael Nevin Miller, Byung-Jin Choi, Sidlgata V. Sreenivasan, Frank Y. Xu +1 more | 2015-03-17 |
| 8877073 | Imprint lithography template | Gerard Schmid, Sidlgata V. Sreenivasan, Frank Y. Xu | 2014-11-04 |
| 8556616 | Template having a varying thickness to facilitate expelling a gas positioned between a substrate and the template | Mario Johannes Meissl, Byung-Jin Choi, Sidlgata V. Sreenivasan | 2013-10-15 |
| 8512585 | Template pillar formation | Gary F. Doyle, Gerard Schmid, Michael Nevin Miller, Dwayne L. LaBrake | 2013-08-20 |
| 8394203 | In-situ cleaning of an imprint lithography tool | Gerard Schmid, Ian McMackin, Byung-Jin Choi | 2013-03-12 |
| 7985530 | Etch-enhanced technique for lift-off patterning | Gerard Schmid | 2011-07-26 |
| 7906274 | Method of creating a template employing a lift-off process | Gerard Schmid, Michael Nevin Miller | 2011-03-15 |
| 7874831 | Template having a silicon nitride, silicon carbide or silicon oxynitride film | Mario Johannes Meissl, Kosta S. Selinidis, Frank Y. Xu | 2011-01-25 |
| 7547398 | Self-aligned process for fabricating imprint templates containing variously etched features | Gerard Schmid, Nicholas A. Stacey, Ronald D. Voisin, Lawrence J. Myron | 2009-06-16 |
| 7432024 | Lithographic template and method of formation and use | Albert Alec Talin, Jeffrey H. Baker, William J. Dauksher, Andy E. Hooper | 2008-10-07 |
| 7163888 | Direct imprinting of etch barriers using step and flash imprint lithography | Kathy A. Gehoski, William J. Dauksher, Ngoc Le | 2007-01-16 |
| 7083880 | Lithographic template and method of formation and use | Albert Alec Talin, Jeffrey H. Baker, William J. Dauksher, Andy E. Hooper | 2006-08-01 |
| 7063919 | Lithographic template having a repaired gap defect method of repair and use | David Mancini, William J. Dauksher, Kevin J. Nordquist | 2006-06-20 |
| 6890688 | Lithographic template and method of formation and use | David Mancini, Carlton G. Willson | 2005-05-10 |
| 6852454 | Multi-tiered lithographic template and method of formation and use | David Mancini | 2005-02-08 |
| 6630746 | Semiconductor device and method of making the same | David Mancini, Harland G. Tompkins, Karen E. Moore | 2003-10-07 |
| 6576520 | Amorphous carbon layer for improved adhesion of photoresist and method of fabrication | David Mancini, Steven M. Smith | 2003-06-10 |
| 6562553 | Lithographic printing method using a low surface energy layer | David Mancini | 2003-05-13 |
| 6368924 | Amorphous carbon layer for improved adhesion of photoresist and method of fabrication | David Mancini, Steven M. Smith | 2002-04-09 |