Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6954256 | Gradient immersion lithography | John Doering | 2005-10-11 |
| 6943941 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Kevin Cummings | 2005-09-13 |
| 6887625 | Assist features for use in lithographic projection | Johannes Jacobus Matheus Baselmans, Markus Schluter, Robert John Socha | 2005-05-03 |
| 6855486 | Lithographic method and apparatus | Jozef Marie Finders, Johannes Jacobus Matheus Baselmans, Igor Petrus Maria Bouchoms | 2005-02-15 |
| 5569501 | Diamond-like carbon films from a hydrocarbon helium plasma | Fredric D. Bailey, Douglas A. Buchanan, Alessandro C. Callegari, Howard M. Clearfield, Fuad E. Doany +8 more | 1996-10-29 |
| 5517340 | High performance projection display with two light valves | Fuad E. Doany, Alan E. Rosenbluth | 1996-05-14 |
| 5470661 | Diamond-like carbon films from a hydrocarbon helium plasma | Fredric D. Bailey, Douglas A. Buchanan, Alessandro C. Callegari, Howard M. Clearfield, Fuad E. Doany +8 more | 1995-11-28 |
| 5238773 | Alkaline developable photoresist composition containing radiation sensitive organosilicon compound with quinone diazide terminal groups | Edward D. Babich, Michael Hatzakis, Jurij R. Paraszczak, Jane M. Shaw, David F. Witman | 1993-08-24 |
| 5054872 | Polymeric optical waveguides and methods of forming the same | Bunsen Fan, Jeffrey D. Gelorme, Modest M. Oprysko, Albert Speth, Jeannine M. Trewhella | 1991-10-08 |
| 4840923 | Simultaneous multiple level interconnection process | Janusz S. Wilczynski, David F. Witman | 1989-06-20 |
| 4770947 | Multiple density mask and fabrication thereof | Jane M. Shaw, David F. Witman | 1988-09-13 |