| 5534094 |
Method for fabricating multi-layer thin film structure having a separation layer |
Gnanalingam Arjavalingam, Alina Deutsch, Fuad E. Doany, Bruce K. Furman, Donald J. Hunt +7 more |
1996-07-09 |
| 5286599 |
Base developable negative photoresist composition and use thereof |
Edward D. Babich, Eileen A. Galligan, Jeffrey D. Gelorme, Richard P. McGouey, Sharon L. Nunes +2 more |
1994-02-15 |
| 5258236 |
Multi-layer thin film structure and parallel processing method for fabricating same |
Gnanalingam Arjavalingam, Alina Deutsch, Fuad E. Doany, Bruce K. Furman, Donald J. Hunt +7 more |
1993-11-02 |
| 5238773 |
Alkaline developable photoresist composition containing radiation sensitive organosilicon compound with quinone diazide terminal groups |
Edward D. Babich, Donis Flagello, Michael Hatzakis, Jurij R. Paraszczak, Jane M. Shaw |
1993-08-24 |
| 5115095 |
Epoxy functional organosilicon polymer |
Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart |
1992-05-19 |
| 5110711 |
Method for forming a pattern |
Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart |
1992-05-05 |
| 5098816 |
Method for forming a pattern of a photoresist |
Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart |
1992-03-24 |
| 5059512 |
Ultraviolet light sensitive photoinitiator compositions, use thereof and radiation sensitive compositions |
Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart |
1991-10-22 |
| 4981909 |
Plasma-resistant polymeric material, preparation thereof, and use thereof |
Edward D. Babich, Michael Hatzakis, Scott Jacobs, Juri R. Parasczcak, Jane M. Shaw |
1991-01-01 |
| 4840923 |
Simultaneous multiple level interconnection process |
Donis Flagello, Janusz S. Wilczynski |
1989-06-20 |
| 4782008 |
Plasma-resistant polymeric material, preparation thereof, and use thereof |
Edward D. Babich, Michael Hatzakis, Scott Jacobs, Juri R. Parasczcak, Jane M. Shaw |
1988-11-01 |
| 4770947 |
Multiple density mask and fabrication thereof |
Donis Flagello, Jane M. Shaw |
1988-09-13 |
| 4744615 |
Laser beam homogenizer |
Bunsen Fan, Raymond E. Tibbetts, Janusz S. Wilczynski |
1988-05-17 |
