Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5534094 | Method for fabricating multi-layer thin film structure having a separation layer | Gnanalingam Arjavalingam, Alina Deutsch, Fuad E. Doany, Bruce K. Furman, Donald J. Hunt +7 more | 1996-07-09 |
| 5286599 | Base developable negative photoresist composition and use thereof | Edward D. Babich, Eileen A. Galligan, Jeffrey D. Gelorme, Richard P. McGouey, Sharon L. Nunes +2 more | 1994-02-15 |
| 5258236 | Multi-layer thin film structure and parallel processing method for fabricating same | Gnanalingam Arjavalingam, Alina Deutsch, Fuad E. Doany, Bruce K. Furman, Donald J. Hunt +7 more | 1993-11-02 |
| 5238773 | Alkaline developable photoresist composition containing radiation sensitive organosilicon compound with quinone diazide terminal groups | Edward D. Babich, Donis Flagello, Michael Hatzakis, Jurij R. Paraszczak, Jane M. Shaw | 1993-08-24 |
| 5115095 | Epoxy functional organosilicon polymer | Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart | 1992-05-19 |
| 5110711 | Method for forming a pattern | Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart | 1992-05-05 |
| 5098816 | Method for forming a pattern of a photoresist | Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart | 1992-03-24 |
| 5059512 | Ultraviolet light sensitive photoinitiator compositions, use thereof and radiation sensitive compositions | Edward D. Babich, Jeffrey D. Gelorme, Michael Hatzakis, Jane M. Shaw, Kevin J. Stewart | 1991-10-22 |
| 4981909 | Plasma-resistant polymeric material, preparation thereof, and use thereof | Edward D. Babich, Michael Hatzakis, Scott Jacobs, Juri R. Parasczcak, Jane M. Shaw | 1991-01-01 |
| 4840923 | Simultaneous multiple level interconnection process | Donis Flagello, Janusz S. Wilczynski | 1989-06-20 |
| 4782008 | Plasma-resistant polymeric material, preparation thereof, and use thereof | Edward D. Babich, Michael Hatzakis, Scott Jacobs, Juri R. Parasczcak, Jane M. Shaw | 1988-11-01 |
| 4770947 | Multiple density mask and fabrication thereof | Donis Flagello, Jane M. Shaw | 1988-09-13 |
| 4744615 | Laser beam homogenizer | Bunsen Fan, Raymond E. Tibbetts, Janusz S. Wilczynski | 1988-05-17 |