Issued Patents All Time
Showing 25 most recent of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9925561 | Capacitive micromachined ultrasonic transducer with multiple deflectable membranes | Tahereh Arezoo Emadi | 2018-03-27 |
| 7923743 | Semiconductor structure including mixed rare earth oxide formed on silicon | Nestor A. Bojarczuk, Supratik Guha, Vijay Narayanan, Lars-Ake Ragnarsson | 2011-04-12 |
| 7887711 | Method for etching chemically inert metal oxides | Eduard A. Cartier, Evgeni Gousev, Harald Okorn-Schmidt, Katherine L. Saenger | 2011-02-15 |
| 7863083 | High temperature processing compatible metal gate electrode for pFETS and methods for fabrication | Ricky S. Amos, Cyril Cabral, Jr., Alessandro C. Callegari, Supratik Guha, Hyungjun Kim +4 more | 2011-01-04 |
| 7648864 | Semiconductor structure including mixed rare earth oxide formed on silicon | Nestor A. Bojarczuk, Supratik Guha, Vijay Narayanan, Lars-Ake Ragnarsson | 2010-01-19 |
| 7432550 | Semiconductor structure including mixed rare earth oxide formed on silicon | Nestor A. Bojarczuk, Supratik Guha, Vijay Narayanan, Lars-Ake Ragnarsson | 2008-10-07 |
| 7326610 | Process options of forming silicided metal gates for advanced CMOS devices | Ricky S. Amos, Cyril Cabral, Jr., Evgeni Gousev, Victor Ku, An Steegen | 2008-02-05 |
| 7029966 | Process options of forming silicided metal gates for advanced CMOS devices | Ricky S. Amos, Cyril Cabral, Jr., Evgeni Gousev, Victor Ku, An Steegen | 2006-04-18 |
| 6984591 | Precursor source mixtures | Deborah A. Neumayer | 2006-01-10 |
| 6958506 | High-dielectric constant insulators for feol capacitors | Evgeni Gousev, Harald Okorn-Schmidt, Arne Ballantine, Eduard A. Cartier, Douglas D. Coolbaugh | 2005-10-25 |
| 6887797 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2005-05-03 |
| 6852575 | Method of forming lattice-matched structure on silicon and structure formed thereby | Nestor A. Bojarczuk, Supratik Guha, Vijay Narayanan, Lars-Ake Ragnarsson | 2005-02-08 |
| 6803266 | Process for passivating the semiconductor-dielectric interface of a MOS device and MOS device formed thereby | Paul M. Solomon, Eduard A. Cartier, Kathryn Guarini, Fenton R. McFeely, Huiling Shang +1 more | 2004-10-12 |
| 6756646 | Oxynitride gate dielectric and method of forming | Matthew W. Copel, Patrick R. Varekamp | 2004-06-29 |
| 6667207 | High-dielectric constant insulators for FEOL capacitors | Arne Ballantine, Eduard A. Cartier, Douglas D. Coolbaugh, Evgeni Gousev, Harald Okorn-Schmidt | 2003-12-23 |
| 6603181 | MOS device having a passivated semiconductor-dielectric interface | Paul M. Solomon, Eduard A. Cartier, Kathryn Guarini, Fenton R. McFeely, Huiling Shang +1 more | 2003-08-05 |
| 6566281 | Nitrogen-rich barrier layer and structures formed | Matthew W. Copel, Fenton R. McFeely, Patrick R. Varekamp, Mark Monroe Banaszak Holl, Kyle Erik Litz | 2003-05-20 |
| 6511873 | High-dielectric constant insulators for FEOL capacitors | Arne Ballantine, Eduard A. Cartier, Douglas D. Coolbaugh, Evgeni Gousev, Harald Okorn-Schmidt | 2003-01-28 |
| 6511876 | High mobility FETS using A1203 as a gate oxide | Alessandro C. Callegari, Michael A. Gribelyuk, Paul C. Jamison, Deborah A. Neumayer | 2003-01-28 |
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel, Christopher P. D'Emic +6 more | 2002-09-03 |
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-08-20 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-02-12 |
| 6245616 | Method of forming oxynitride gate dielectric | Matthew W. Copel, Patrick R. Varekamp | 2001-06-12 |
| 6091122 | Fabrication of mid-cap metal gates compatible with ultra-thin dielectrics | Fenton R. McFeely, John J. Yurkas | 2000-07-18 |
| 5789312 | Method of fabricating mid-gap metal gates compatible with ultra-thin dielectrics | Fenton R. McFeely, John J. Yurkas | 1998-08-04 |