Issued Patents All Time
Showing 25 most recent of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9392690 | Method and structure to improve the conductivity of narrow copper filled vias | Chih-Chao Yang | 2016-07-12 |
| 9343407 | Method to fabricate copper wiring structures and structures formed thereby | Chih-Chao Yang | 2016-05-17 |
| 9048296 | Method to fabricate copper wiring structures and structures formed thereby | Chih-Chao Yang | 2015-06-02 |
| 8785320 | Structure and process for metallization in high aspect ratio features | Chih-Chao Yang | 2014-07-22 |
| 8661664 | Techniques for forming narrow copper filled vias having improved conductivity | Chih-Chao Yang | 2014-03-04 |
| 8497580 | Noble metal cap for interconnect structures | Chih-Chao Yang, Daniel C. Edelstein | 2013-07-30 |
| 8450204 | Structure and process for metallization in high aspect ratio features | Chih-Chao Yang | 2013-05-28 |
| 8258495 | Chemical vapor deposition method for the incorporation of nitrogen into materials including germanium and antimony | Jennifer L. Gardner, John J. Yurkas | 2012-09-04 |
| 8242030 | Activation of graphene buffer layers on silicon carbide by ultra low temperature oxidation | James B. Hannon, Satoshi Oida, John J. Yurkas | 2012-08-14 |
| 8232647 | Structure and process for metallization in high aspect ratio features | Chih-Chao Yang | 2012-07-31 |
| 8153514 | Method of forming metal/high-κ gate stacks with high mobility | Wanda Andreoni, Alessandro C. Callegari, Eduard A. Cartier, Alessandro Curioni, Christopher P. D'Emic +9 more | 2012-04-10 |
| 7998864 | Noble metal cap for interconnect structures | Chih-Chao Yang, Daniel C. Edelstein | 2011-08-16 |
| 7964497 | Structure to facilitate plating into high aspect ratio vias | Chih-Chao Yang | 2011-06-21 |
| 7884018 | Method for improving the selectivity of a CVD process | Chih-Chao Yang | 2011-02-08 |
| 7863083 | High temperature processing compatible metal gate electrode for pFETS and methods for fabrication | Ricky S. Amos, Douglas A. Buchanan, Cyril Cabral, Jr., Alessandro C. Callegari, Supratik Guha +4 more | 2011-01-04 |
| 7749802 | Process for chemical vapor deposition of materials with via filling capability and structure formed thereby | Alejandro G. Schrott, John J. Yurkas | 2010-07-06 |
| 7678421 | Method for increasing deposition rates of metal layers from metal-carbonyl precursors | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Sandra G. Malhotra | 2010-03-16 |
| 7667277 | TiC as a thermally stable p-metal carbide on high k SiO2 gate stacks | Alessandro C. Callegari, Michael A. Gribelyuk, Dianne L. Lacey, Katherine L. Saenger, Sufi Zafar | 2010-02-23 |
| 7566938 | Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures | Cyril Cabral, Jr., Alessandro C. Callegari, Michael A. Gribelyuk, Paul C. Jamison, Dianne L. Lacey +4 more | 2009-07-28 |
| 7521346 | Method of forming HfSiN metal for n-FET applications | Alessandro C. Callegari, Martin M. Frank, Rajarao Jammy, Dianne L. Lacey, Sufi Zafar | 2009-04-21 |
| 7488656 | Removal of charged defects from metal oxide-gate stacks | Eduard A. Cartier, Matthew W. Copel, Supratik Guha, Richard A. Haight, Vijay Narayanan | 2009-02-10 |
| 7488512 | Method for preparing solid precursor tray for use in solid precursor evaporation system | Kenji Suzuki, Emmanuel Guidotti, Gerrit J. Leusink, Masamichi Hara, Daisuke Kuroiwa +2 more | 2009-02-10 |
| 7439180 | Dispenser system for atomic beam assisted metal organic chemical vapor deposition (MOCVD) | Supratik Guha, John J. Yurkas | 2008-10-21 |
| 7419702 | Method for processing a substrate | Kazuhito Nakamura, Cory Wajda, Enrico Mosca, Yumiko Kawano, Gert Leusink +1 more | 2008-09-02 |
| 7345184 | Method and system for refurbishing a metal carbonyl precursor | Kenji Suzuki, Gerrit J. Leusink | 2008-03-18 |