Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264667 | Lithographic apparatus and device manufacturing method using interferometric and other exposure | Kars Zeger Troost, Johannes Jacobus Matheus Baselmans | 2012-09-11 |
| 7548302 | Lithographic apparatus and device manufacturing method | Arno Jan Bleeker, Donis Flagello, Robert John Socha, Kars Zeger Troost | 2009-06-16 |
| 7317506 | Variable illumination source | Donis Flagello, Robert John Socha | 2008-01-08 |
| 4264711 | Method of compensating for proximity effects in electron-beam lithography | — | 1981-04-28 |