Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Markus Franciscus Antonius Eurlings, Marcel Mathijs Theodore Marie Dierichs | 2005-08-09 |
| 6765218 | Lithographic projection apparatus with positioning system for use with reflectors | Erik Roelof Loopstra | 2004-07-20 |
| 6765712 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Erik Loopstra, Dominicus Jacobus Petrus Adrianus Franken | 2004-07-20 |
| 6750949 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Dominicus Jacobus Petrus Adrianus Franken, Josephus Jacobus Smits, Johannes Hubertus Josephina Moors, Albrecht Hof +3 more | 2004-06-15 |
| 6737662 | Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product | Heine Melle Mulder, Jan Bernard Plechelmus Van Schoot, Markus Franciscus Antonius Eurlings, Marcel Mathijs Theodore Marie Dierichs | 2004-05-18 |
| 6597434 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2003-07-22 |
| 6597431 | Lithographic projection apparatus and device manufacturing method | Jozef Petrus Henricus Benschop, Oscar Fransiscus Jozephus Noordman, Michael J. M. Renkens, Erik Roelof Loopstra, Vadim Yevgenyevich Banine +1 more | 2003-07-22 |
| 6593585 | Lithographic projection apparatus with positioning system for use with reflectors | Erik Roelof Loopstra | 2003-07-15 |