| 8089613 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Johannes Wilhelmus Maria Cornelis Teeuwsen, Erik Petrus Buurman |
2012-01-03 |
| 7843552 |
Lithographic apparatus, device manufacturing method, and mask having a pellicle attached hereto |
Orlando Serapio Cicilia, Tammo Uitterdijk, Herman Boom |
2010-11-30 |
| 7817247 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus De Kruif, Johannes Wilhelmus Maria Cornelis Teeuwsen, Erik Petrus Buurman |
2010-10-19 |
| 7781029 |
Side seal for wet lens elements |
Matthew Lipson, Taras Shvets |
2010-08-24 |
| 7595863 |
Lithographic apparatus, excimer laser and device manufacturing method |
Robertus Cornelis Martinus Kruif, Thomas Josephus Maria Castenmiller, Johannes Wilhelmus De Klerk, Erik Petrus Buurman |
2009-09-29 |
| 7534552 |
Lithographic apparatus and device manufacturing method |
Robertus Cornelis Martinus De Kruif |
2009-05-19 |
| 7528929 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2009-05-05 |
| 7379154 |
Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle |
Orlando Serapio Cicilia, Hendrikus Alphonsus Ludovicus Van Dijck, Gerardus Carolus Johannus Hofmans, Tammo Uitterdijk |
2008-05-27 |
| 7239370 |
Lithographic apparatus and device manufacturing method |
Albert Johannes Maria Jansen, Marcel Koenraad Marie Baggen, Johannes Christiaan Maria Jasper, Raymond Laurentius Johannes Schrijver, Johannes Jacobus Matheus Baselmans +2 more |
2007-07-03 |
| 7199863 |
Method of imaging using lithographic projection apparatus |
Marcel Johannes Louis Marie Demarteau, Bertus Johan Vleeming, Thomas Leo Maria Hoogenboom |
2007-04-03 |
| 7136152 |
Method for bonding a pellicle to a patterning device and patterning device comprising a pellicle |
Joseph Laganza, Tammo Uitterdijk, Herman Boom |
2006-11-14 |