| 9164391 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper |
2015-10-20 |
| 8970818 |
Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient |
Han-Kwang Nienhuys, Sven Pekelder, Roger W. Schmitz, Alexander Marinus Arnoldus Huijberts, Paulus Albertus Maria Gasseling |
2015-03-03 |
| 8859188 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Anthonie Kuijper |
2014-10-14 |
| 8817229 |
Method of cooling an optical element, lithographic apparatus and method for manufacturing a device |
Erik Roelof Loopstra |
2014-08-26 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +9 more |
2014-08-05 |
| 8760621 |
Lithographic apparatus and method |
Christiaan Alexander Hoogendam |
2014-06-24 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot +11 more |
2014-05-20 |
| 8681308 |
Lithographic apparatus and device manufacturing method |
Paul Petrus Joannes Berkvens, Roelof Frederik De Graaf, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +10 more |
2014-03-25 |
| 8680493 |
Radiation conduit for radiation source |
Maikel Adrianus Cornelis Schepers, Markus Franciscus Antonius Eurlings, Bernard Jacob Andries Stommen, Hrishikesh Patel, Hermanus Johannes Maria Kreuwel +3 more |
2014-03-25 |
| 8537330 |
Lithographic apparatus, device manufacturing method and computer readable medium |
Erik Roelof Loopstra, Marius Ravensbergen |
2013-09-17 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2013-07-09 |
| 8472003 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +11 more |
2013-06-25 |
| 8462314 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Marcus Adrianus Van De Kerkhof, Siebe Landheer, Wouterus Johannes Petrus Maria Maas, Jeroen Peter Johannes Bruijstens +2 more |
2013-06-11 |
| 8451423 |
Lithographic apparatus and method |
Siebe Landheer, Yücel Kök, Marcel Beckers, Ivo Adam Johannes Thomas, Marcio Alexandre Cano Miranda |
2013-05-28 |
| 8233134 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Marcel Beckers, Jeroen Peter Johannes Bruijstens, Ivo Adam Johannes Thomas |
2012-07-31 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2012-03-20 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2011-04-19 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders +6 more |
2010-07-06 |
| 7652746 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate |
2010-01-26 |
| 7633073 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2009-12-15 |
| 7561250 |
Lithographic apparatus having parts with a coated film adhered thereto |
Paulus Martinus Maria Liebregts, Menno Fien, Erik Roelof Loopstra, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons +3 more |
2009-07-14 |