Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9606445 | Lithographic apparatus and method of manufacturing a device | Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Marcel Johannus Elisabeth Hubertus Muitjens, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi +8 more | 2017-03-28 |
| 8970818 | Lithographic apparatus and component with repeating structure having increased thermal accommodation coefficient | Han-Kwang Nienhuys, Franciscus Johannes Joseph Janssen, Sven Pekelder, Roger W. Schmitz, Alexander Marinus Arnoldus Huijberts | 2015-03-03 |