Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7432513 | Gas shower, lithographic apparatus and use of a gas shower | Ronald Van Der Ham, Niek Jacobus Johannes Roset | 2008-10-07 |
| 7327438 | Lithographic apparatus and method of a manufacturing device | Koen Jacobus Johannes Maria Zaal, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema, Joost Jeroen Ottens | 2008-02-05 |
| 7239368 | Using unflatness information of the substrate table or mask table for decreasing overlay | Rene Oesterholt, Ralph Brinkhof, Leon Martin Levasier, Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal +1 more | 2007-07-03 |
| 7227612 | Lithographic apparatus and device manufacturing method | Antonius Johannes Van Der Net, Ronald Van Der Ham | 2007-06-05 |
| 7161662 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Joost Jeroen Ottens, Koen Jacobus Johannes Maria Zaal | 2007-01-09 |
| 7119885 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Aschwin Lodewijk Hendricus Johannes Van Meer, Jan Rein Miedema, Koen Jacobus Johannes Maria Zaal | 2006-10-10 |
| 7113262 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Aschwin Lodewijk Hendricus Johannes Van Meer, Koen Jacobus Johannes Maria Zaal, Ton Aantjes | 2006-09-26 |
| 7110091 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens, Jan Hopman | 2006-09-19 |
| 7110085 | Lithographic apparatus, substrate holder and method of manufacturing | Koen Jacobus Johannes Maria Zaal, Joost Jeroen Ottens | 2006-09-19 |
| 7106412 | Lithographic apparatus comprising a gas flushing system | Pieter Klaas De Bokx, Ronald Johannes Hultermans, Adrianus Cornelius Antonius Jonkers | 2006-09-12 |
| 6933513 | Gas flushing system for use in lithographic apparatus | Raymond Laurentius Johannes Schrijver, Johannes Andreas Henricus Maria Jacobs, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars | 2005-08-23 |
| 6707530 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Raymond Laurentius Johannes Schrijver, Marcel Koenraad Marie Baggen | 2004-03-16 |
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Raymond Laurentius Johannes Schrijver, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Yim-Bun Patrick Kwan, Erik Roelof Loopstra | 2003-04-01 |
| 6480260 | Mask clamping apparatus, e.g. for a lithographic apparatus | Sjoerd Nicolaas Lambertus Donders | 2002-11-12 |
| 6413701 | Lithographic projection apparatus | Hans Jansen | 2002-07-02 |
| 6232615 | Lithographic projection apparatus with improved substrate holder | — | 2001-05-15 |