Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9176398 | Method and system for thermally conditioning an optical element | Roger W. Schmitz, Tjarko Adriaan Rudolf Van Empel, Marcel Johannus Elisabeth Hubertus Muitjens, Lun Kai Cheng, Franciscus Johannes Joseph Janssen +9 more | 2015-11-03 |
| 8072575 | Lithographic apparatus with temperature sensor and device manufacturing method | Tjarko Adriaan Rudolf Van Empel | 2011-12-06 |
| 6796659 | Projection display device | Theodoor Bastiaan Johannes Haddeman, Franciscus Guillaume Peter Sools | 2004-09-28 |