Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383490 | Depolarizer, telescope and remote sensing device and method | Borgert Kruizinga, Huibert Visser | 2016-07-05 |
| 9304300 | Anamorphotic telescope | Huibert Visser, Borgert Kruizinga | 2016-04-05 |
| 8559108 | Grating for EUV-radiation, method for manufacturing the grating and wavefront measurement system | Borgert Kruizinga, Martijn Gerard Dominique Wehrens, Kornelis Frits Feenstra | 2013-10-15 |
| 8164077 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Markus Weiss, Stephan Muellender, Johann Trenkler, Hartmut Enkisch +3 more | 2012-04-24 |
| 7732762 | Method of inspecting a specimen surface, apparatus and use of fluorescent material | Pieter Kruit | 2010-06-08 |
| 7646004 | Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element | Marco Wedowski, Markus Weiss, Stephan Müllender, Johann Trenkler, Hartmut Enkisch +3 more | 2010-01-12 |
| 7491951 | Lithographic apparatus, system and device manufacturing method | Marc Hubertus Lorenz Van Der Velden, Vadim Yevgenyevich Banine, Bastiaan Mertens, Johannes Hubertus Josephina Moors, Markus Weiss +1 more | 2009-02-17 |
| 7390614 | Lithographic apparatus and device manufacturing method | Johannes Gijsbertsen, Pieter Willem Herman De Jager | 2008-06-24 |
| 7379153 | Lithographic apparatus and device manufacturing method | Johannes Gijsbertsen, Pieter Willem Herman De Jager | 2008-05-27 |