| 9746782 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Nicolaas Rudolf Kemper |
2017-08-29 |
| 9645506 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +11 more |
2017-05-09 |
| 9625828 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko, Nina Vladimirovna Dziomkina +6 more |
2017-04-18 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2017-03-28 |
| 9606449 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2017-03-28 |
| 9588437 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2017-03-07 |
| 9563132 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
David Bessems, Erik Henricus Egidius Catharina Eummelen, Rogier Hendrikus Magdalena Cortie, Adrianes Johannes Baeten, Cornelius Maria Rops |
2017-02-07 |
| 9477153 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2016-10-25 |
| 9442390 |
Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Cornelius Maria Rops |
2016-09-13 |
| 9411238 |
Source-collector device, lithographic apparatus, and device manufacturing method |
Andrei Mikhailovich Yakunin, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Martinus Cornelis Maria Verhagen +5 more |
2016-08-09 |
| 9383654 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Daniel Jozef Maria Direcks, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Danny Maria Hubertus Philips, Clemens Johannes Gerardus Van Den Dungen +2 more |
2016-07-05 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9256136 |
Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply |
Rogier Hendrikus Magdalena Cortie, Paulus Martinus Maria Liebregts, Fabrizio Evangelista |
2016-02-09 |
| 9235138 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Nicolaas Ten Kate, Niek Jacobus Johannes Roset, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2016-01-12 |
| 9229334 |
Lithographic apparatus and a device manufacturing method |
Cornelius Maria Rops, Nicolaas Rudolf Kemper |
2016-01-05 |
| 9229335 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2016-01-05 |
| 9213246 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2015-12-15 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 9176393 |
Lithographic apparatus and a method of operating the apparatus |
Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen +3 more |
2015-11-03 |
| 9146478 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2015-09-29 |
| 9140995 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
— |
2015-09-22 |
| 9081300 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2015-07-14 |
| 9069262 |
Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Cornelius Maria Rops |
2015-06-30 |
| 8953142 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Nicolaas Ten Kate, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi +4 more |
2015-02-10 |
| 8902400 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus |
Raymond Wilhelmus Louis Lafarre, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista |
2014-12-02 |