| 8860924 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2014-10-14 |
| 8804094 |
Lithographic apparatus and a device manufacturing method |
Nicolaas Rudolf Kemper |
2014-08-12 |
| 8780324 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Rob Cornelissen |
2014-07-15 |
| 8711326 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Ronald Van Der Ham, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Richard Moerman, Sergei Shulepov +8 more |
2014-04-29 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +3 more |
2014-04-01 |
| 8681311 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Sergei Shulepov, Sjoerd Nicolaas Lambertus Donders |
2014-03-25 |
| 8675172 |
Lithographic apparatus and method of removing liquid |
Hernes Jacobs, Erik Roelof Loopstra, Eva Mondt |
2014-03-18 |
| 8654309 |
Fluid extraction system, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Robertus Nicodemus Jacobus Van Ballegoij, Marcus Martinus Petrus Adrianus Vermeulen, Martinus Wilhelmus Van Den Heuvel, Paul Petrus Joannes Berkvens +3 more |
2014-02-18 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-01-21 |
| 8614784 |
Fluid handling structure, lithographic apparatus and device manufacturing method, involving gas supply |
Nicolaas Rudolf Kemper, Johannes Catharinus Hubertus Mulkens, Rogier Hendrikus Magdalena Cortie, Ralph Joseph Meijers, Fabrizio Evangelista |
2013-12-24 |
| 8547523 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper |
2013-10-01 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2013-07-09 |
| 8421996 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Marcel Beckers, Johannes Petrus Maria Smeulers, Sergei Shulepov +2 more |
2013-04-16 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Marco Koert Stavenga, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens +16 more |
2013-03-26 |
| 8345218 |
Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Johannes Petrus Martinus Bernardus Vermeulen, Daniel Jozef Maria Direcks, Danny Maria Hubertus Philips, Arnold Jan Van Putten |
2013-01-01 |
| 8274641 |
Substrate table, lithographic apparatus and device manufacturing method |
Eva Mondt, Noud Jan Gilissen, Hernes Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra +1 more |
2012-09-25 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen +4 more |
2012-08-21 |
| 8149379 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Lucas Henricus Johannes Stevens, Ronald Van Der Ham |
2012-04-03 |
| 8144305 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Sergei Shulepov |
2012-03-27 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2012-03-20 |
| 8115903 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders +1 more |
2012-02-14 |
| 8023101 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Nicolaas Ten Kate, Sergei Shulepov |
2011-09-20 |
| 7959310 |
Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element |
Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein +8 more |
2011-06-14 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +3 more |
2011-04-19 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2011-04-19 |